MICRO AND NANO SENSORS

This course is aimed to provide basic and some advance knowledege on sensors, microsensors, MEMS and related fabrication technologies.

Nanotechnologies will be also addressed together with some information on instrumentation for devices analysis and fabrication.

Microsensors design methodologies will be presented together with CAD tools.

Several different transduction methodologies will be presented together with sensors and transducers at micro and nano scale.

Extensive laboratory activities are planned, students wil be involved in the running laboratory activities and will be challenged to develop experimental activities at several different stages of the sensor development.

Laborotory activity will be a fundumental part of the oral exam.

- Individual notes taken in class

- slides provided by the Professor

- Booksi:

• Webster, Pallas-Areny, “Sensors and signal conditioning”, Wiley, 2002
• G. T. A. Kovacs, “Micromachined transducers sourcebook”, Mc-Graw Hill, 1998
• M. Madou, Fundamentals of microfabrication, CRC Press